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Patent Searching and Data


Title:
DISTANCE MEASURING METHOD, AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2009244808
Kind Code:
A
Abstract:

To perform high-definition image exposure by use of a distance sensor having a small measuring range or a limited measuring distance and provided with a hold function.

A control unit causes in advance a laser light source part to emit light, starts measuring movement of a moving table with a substrate material placed thereon, reads a distance D measured by the distance sensor at a distance measurement time, and terminates the reading of the distance D at a measurement end time (steps 100-110). Thereafter, the control unit confirms whether scanning exposure to the substrate material is started or not, stops the light emission of the laser light source part when exposure processing is started, and releases the holding of the measurement value in the distance sensor (steps 112 and 114) to prevent a measurement error for the substrate material out of a valid range due to the held measurement value. When the scanning exposure to the substrate material ends, the control unit starts the light emission in the laser light emission part to measure the distance to the next substrate material (steps 116 and 118).


Inventors:
UEMURA TAKAYUKI
ONO KAORU
Application Number:
JP2008000094268
Publication Date:
October 22, 2009
Filing Date:
March 31, 2008
Export Citation:
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Assignee:
FUJIFILM CORP
International Classes:
G03F9/02; G01B11/00; G01C3/06; H01L21/027; H05K3/00
Attorney, Agent or Firm:
中島 淳
加藤 和詳
西元 勝一
福田 浩志