To provide a driving device capable of positioning a moving body with high accuracy even when a plurality of position detection points of the moving body exist with a large interval.
The driving device comprises a magnetic field generating member 7 for generating a magnetic field; a magnetic field detecting means 6 formed of first, second, and third magnetic field detection elements 6A, 6B and 6C for detecting a magnetic field; and a piezoelectric actuator P for moving the magnetic field generating member 7. In relatively positioning the magnetic field generating member 7 and the magnetic field detecting means 6, based on the detection result in the magnetic field detecting means 6, in a movable range where the magnetic field generating member 7 moves, the first positioning is performed, based on the detection result of the first and second magnetic field detection elements 6A and 6B in a predetermined region, and the second positioning is performed, based on the detection result of the third magnetic field detection element 6C at a predetermined point separated from the predetermined region.
SUGITANI KAZUMI
YOSHIDA RYUICHI
FUJII SHUICHI
NAKANISHI HIDEAKI
HOSHINO TAKAYUKI
SUEYOSHI HIROHISA
JPS638611U | 1988-01-20 | |||
JPH06249605A | 1994-09-09 | |||
JPH11325962A | 1999-11-26 | |||
JP2000500862A | 2000-01-25 | |||
JP2002054902A | 2002-02-20 | |||
JP2003185406A | 2003-07-03 | |||
JP2002062104A | 2002-02-28 | |||
JPS61123910U | 1986-08-04 |
Shigeki Yamada
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