Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTRIC DISCHARGE LIGHT SOURCE UNIT, LIGHTING OPTICAL DEVICE, ALIGNER, AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2005294608
Kind Code:
A
Abstract:

To provide an electric discharge light source unit that can reasonably suppress light intensity loss in a simple structure and an EUV light having a desired light intensity distribution.

This electric discharge light source unit comprises a light source main body (11) for changing a target material (11d) into plasma by electric discharge between a pair of electrodes (11a and 11b) and radiating the EUV light from the generated plasma, a concave mirror reflector (12) for reflecting the EUV light radiated from the light source main body to the above pair of electrodes, and a chamber (13) housing the light source main body and the concave mirror reflector. The partition (13a) of the chamber is provided with an opening (15) for guiding the EUV light reflected by the concave mirror reflector to the outside of the chamber.


Inventors:
KONDO HIROYUKI
Application Number:
JP2004000108673
Publication Date:
October 20, 2005
Filing Date:
April 01, 2004
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NIKON CORP
International Classes:
G21K5/00; G03F7/20; G21K5/02; G21K5/08; H01L21/027; H05G2/00; (IPC1-7): H01L21/027; G03F7/20; G21K5/00; G21K5/02; G21K5/08; H05G2/00
Attorney, Agent or Firm:
Takao Yamaguchi