Title:
ELECTRON BEAM WORK MACHINE
Document Type and Number:
Japanese Patent JP3266743
Kind Code:
B2
Abstract:
PURPOSE: To suppress consuming a cassette vessel by shortening a work time, and preventing foreign matter from sticking to the cassette vessel, with a simple device constitution, even in the case of providing a work part in a plurality of places.
CONSTITUTION: Electron guns 32, 33 are provided in upper/side parts of a work chamber 21, to simultaneously apply irradiation respectively of an electron beam 3 relating to different work parts of a workpiece 22 by two sets of these electron guns 32, 33. The workpiece 22 is removed from a cassette vessel 24 by a lift device 28, to hold the workpiece 22 to a hold rotating means 31 of a work stage 21A irradiated by the electron beam 3.
Inventors:
Yoshihiro Yamamoto
Masaru Suzuki
Masaru Suzuki
Application Number:
JP22985394A
Publication Date:
March 18, 2002
Filing Date:
September 26, 1994
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
B23K15/00; H01J37/06; H01J37/30; (IPC1-7): H01J37/30; B23K15/00; H01J37/06
Domestic Patent References:
JP58108641A | ||||
JP54157984A | ||||
JP57133629A |
Attorney, Agent or Firm:
Soga Doteru (6 people outside)
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