Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTRON BEAM WORK MACHINE
Document Type and Number:
Japanese Patent JP3266743
Kind Code:
B2
Abstract:

PURPOSE: To suppress consuming a cassette vessel by shortening a work time, and preventing foreign matter from sticking to the cassette vessel, with a simple device constitution, even in the case of providing a work part in a plurality of places.
CONSTITUTION: Electron guns 32, 33 are provided in upper/side parts of a work chamber 21, to simultaneously apply irradiation respectively of an electron beam 3 relating to different work parts of a workpiece 22 by two sets of these electron guns 32, 33. The workpiece 22 is removed from a cassette vessel 24 by a lift device 28, to hold the workpiece 22 to a hold rotating means 31 of a work stage 21A irradiated by the electron beam 3.


Inventors:
Yamamoto, Yoshihiro
Suzuki, Masaru
Application Number:
JP22985394A
Publication Date:
March 18, 2002
Filing Date:
September 26, 1994
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B23K15/00; H01J37/06; H01J37/30; (IPC1-7): H01J37/30; B23K15/00; H01J37/06
Attorney, Agent or Firm:
曾我 道照 (外6名)