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Patent Searching and Data


Title:
ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JPH06103949
Kind Code:
A
Abstract:

PURPOSE: To eliminate the blur of an image, realize an image of high resolution with no irregularity in brightness to be observed and recorded, and concurrently enable the image to be observed under super high accelerating voltage with durability enhanced.

CONSTITUTION: An electron beam image 4a projected over a mask 8 by a final projection lens 3a, is scanned by a deflection coil 10 to take in by a line solid image pick-up camera 9 via a shutter 18 and the slit 8a of the mask 8. The aforesaid image signals are processed by a CPU 12 for image processing/ brightness control, and concurrently they control a liquid crystal voltage control circuit 15, a deflection coil synchronous control circuit 13, a monitor CRT 14 and the like.


Inventors:
YONEHARA KATSUHISA
KATSUTA TEIJI
MATSUI ISAO
Application Number:
JP1992000247544
Publication Date:
April 15, 1994
Filing Date:
September 17, 1992
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01J37/22; H01J37/244; H01J37/26; H01J37/28; H01J37/295; (IPC1-7): H01J37/22
Domestic Patent References:
JPS5741254U1982-03-05
JPH01204343A1989-08-16
JPH04129151A1992-04-30
JPH0381939A1991-04-08
Attorney, Agent or Firm:
小川 勝男