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Title:
ELECTRONIC SPECTROSCOPE
Document Type and Number:
Japanese Patent JPS5794637
Kind Code:
A
Abstract:

PURPOSE: To make a titled device lower in cost and easier to operate by constituting an X-ray generating source serving also as an electron ray source by using a common high voltage power source, heating power source, filament and select switch.

CONSTITUTION: When an anticathode 7 is maintained at the same ground potential as that of a sample 3 by connecting a select switch S to a terminal (a) side, electron rays and soft X-rays are irradiated simultaneously to the sample 3. In this state, spectral analysis of auger electrons generated from the sample 3 is accomplished. At this time, a corresponding amt. of photoelectrons are also generated from the sample 3 by X-ray irradiation other than the electron ray irradiation, but the quantity of the soft X-rays irradiating the sample 3 is weaker than the quantity of reflected electrons and therefore the spectra in accordance with tha photoelectrons are hardly measured. If a filament 8 is set at ground potential by changing the switch S to the (b) side, the anticathode 7 has higher potential than that of the sample 3. Namely, the reflected electron rays from the cathode 7 are decelerated and do not arrive at the sample 3. This results in that only the soft X-rays are irradiated and the measurement of the energy spectra of the photoelectron is made possible.


Inventors:
SASAKI SUMIO
MUROTA MASAO
KOJIMA KENJI
ITOU TAKASHI
Application Number:
JP17114480A
Publication Date:
June 12, 1982
Filing Date:
December 04, 1980
Export Citation:
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Assignee:
NIPPON ELECTRON OPTICS LAB
International Classes:
G01N23/22; G01N23/227; H01J37/252; (IPC1-7): G01N23/22