PURPOSE: To obtain a photosensitive body which has excellent electric chargeability and low residual potential and is good in both positive and negative electric charge by constituting a barrier layer by alternately laminating thin amorphous silicon films or thin microcrystalline silicon films and thin semiconductor films mainly consisting of boron and nitrogen.

CONSTITUTION: The barrier layer 2 of the electrophotographic sensitive body having a conductive base 1, the barrier layer 2 and a photoconductive layer 3 is constituted by alternately laminating the thin amorphous silicon films or the thin microcrystalline silicon films and the thin semiconductor films mainly consisting of boron and nitrogen. The barrier layer 2 has the superlattice structure of the thin a-Si film or the thin μc-Si film and the thin semiconductor film mainly consisting of B and N. The barrier layer 2 suppresses the flow of the electric charge between the base 1 and the charge generating layer 5 to enhance the charge holding function on the surface of the photosensitive layer and the chargeability of the photosensitive body. The running performance of a carrier is thereby improved and the electrophotographic sensitive body having the excellent charge characteristics on account of high resistance is obtd.