Title:
ELECTROSPRAY DEVICE
Document Type and Number:
Japanese Patent JP2016150307
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an electrospray device capable of improving productivity when forming a thin film on a main surface and a reverse surface of a substrate.SOLUTION: This electrospray device 100 comprises a nozzle 1 for atomizing a solution material 210 in a state of applying voltage thereto, and a substrate 200 is supported in a state of exposing at least a main surface 200a and a reverse surface 200b, and the nozzle 1 includes a first nozzle 1a arranged on the main surface 200a side and a second nozzle 1b arranged on the reverse surface 200b side in a state of exposing at least the main surface 200a and the reverse surface 200b.SELECTED DRAWING: Figure 3
Inventors:
YAMAMOTO KIYOTO
ISHI KAZUTERU
HATAKEYAMA TATSUO
ISHI KAZUTERU
HATAKEYAMA TATSUO
Application Number:
JP2015028882A
Publication Date:
August 22, 2016
Filing Date:
February 17, 2015
Export Citation:
Assignee:
TORAY ENG CO LTD
International Classes:
B05B5/08; B05B5/025; B05B13/02
Domestic Patent References:
| JPH06142560A | 1994-05-24 | |||
| JPH0938527A | 1997-02-10 | |||
| JP2008049281A | 2008-03-06 | |||
| JPH1157540A | 1999-03-02 | |||
| JP2004046153A | 2004-02-12 | |||
| JP2010017703A | 2010-01-28 | |||
| JP2014117690A | 2014-06-30 | |||
| JP2013034909A | 2013-02-21 |
Foreign References:
| US20080067269A1 | 2008-03-20 |
Attorney, Agent or Firm:
宮園 博一
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