To provide an electrostatic actuating device driven by applying a drive voltage smaller than pull-in voltage between a fixed electrode substrate and a movable electrode plate, in which the distance between the fixed electrode substrate and the movable electrode plate is set at the time of non-application of the voltage, three times of the displacement of the movable electrode plate in the application of a determined drive voltage.

This electrostatic actuating device is manufactured by micromachining technique, and comprises the fixed electrode substrate 8 and the movable electrode plate 2 mounted on and connected to the fixed electrode substrate 8 through an anchor part 1 and a flecture 21, and displaced vertically in relation to the fixed electrode substrate 8. The device is driven by applying the drive voltage smaller than pull-in voltage between the fixed electrode substrate 8 and the movable electrode plate 2.