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Title:
ELECTROSTATIC DRIVE DEVICE
Document Type and Number:
Japanese Patent JP2003266391
Kind Code:
A
Abstract:

To provide the electrostatic drive device in which stationary electrode substrates are disposed respectively at an upper side and a lower side of a movable electrode plate.

By means of a switch SW, the electrostatic drive device switches between an upper shift state of the movable electrode plate 2, obtained in such a way that the movable electrode plate 2 and a lower stationary electrode substrate 8 are rendered at the same potential and a voltage lower than an upper pull-in voltage is applied across the movable electrode plate 2 and an upper electrode plate 3; and a lower shift state of the movable electrode plate 2, obtained in such a way that the movable electrode plate 2 and the upper electrode plate 3 are rendered at the same potential and a voltage lower than a lower pull-in voltage is applied across the movable electrode plate 2 and the lower stationary electrode substrate 8.


Inventors:
NORIMATSU SHUNEI
Application Number:
JP2002000075817
Publication Date:
September 24, 2003
Filing Date:
March 19, 2002
Export Citation:
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Assignee:
JAPAN AVIATION ELECTRON
International Classes:
B81B3/00; G02B6/26; G02B6/35; G02B26/08; H02N1/00; B81C3/00; (IPC1-7): B81B3/00; G02B26/08; H02N1/00
Attorney, Agent or Firm:
草野 卓 (外1名)