Title:
EXHAUST PUMP AND EXHAUST SYSTEM
Document Type and Number:
Japanese Patent JP2013015145
Kind Code:
A
Abstract:
To provide a reflector that prevents recoiled particles from entering a treatment chamber.
The reflector 36 includes a reflection plate 38 including: a disc-shaped first reflecting surface member 41 arranged inside an exhaust manifold 16 and arranged to face a turbo molecular pump (TMP) 18; and a toric second reflecting surface member 42 arranged on a peripheral edge of the first reflecting surface member 41 and of which a surface angle is set to point to a rotary shaft 43 of the TMP 18.
Inventors:
MORIYA TAKESHI
MURAKAMI TAKAHIRO
KOBAYASHI YOSHIYUKI
SATO TETSUHARU
SUGAWARA EIICHI
ENDO SHOSUKE
FUJIMORI MASAKI
MURAKAMI TAKAHIRO
KOBAYASHI YOSHIYUKI
SATO TETSUHARU
SUGAWARA EIICHI
ENDO SHOSUKE
FUJIMORI MASAKI
Application Number:
JP2012212772A
Publication Date:
January 24, 2013
Filing Date:
September 26, 2012
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F04D19/04; F04B37/16; H01L21/02
Domestic Patent References:
| JPH0814188A | 1996-01-16 | |||
| JPH03118815A | 1991-05-21 | |||
| JPH06101642A | 1994-04-12 | |||
| JP2004019493A | 2004-01-22 | |||
| JPS6289137U | 1987-06-08 |
Attorney, Agent or Firm:
Another role Shigehisa
Satoshi Muramatsu
Satoshi Muramatsu