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Title:
EXHAUST PUMP AND EXHAUST SYSTEM
Document Type and Number:
Japanese Patent JP2013015145
Kind Code:
A
Abstract:

To provide a reflector that prevents recoiled particles from entering a treatment chamber.

The reflector 36 includes a reflection plate 38 including: a disc-shaped first reflecting surface member 41 arranged inside an exhaust manifold 16 and arranged to face a turbo molecular pump (TMP) 18; and a toric second reflecting surface member 42 arranged on a peripheral edge of the first reflecting surface member 41 and of which a surface angle is set to point to a rotary shaft 43 of the TMP 18.


Inventors:
MORIYA TAKESHI
MURAKAMI TAKAHIRO
KOBAYASHI YOSHIYUKI
SATO TETSUHARU
SUGAWARA EIICHI
ENDO SHOSUKE
FUJIMORI MASAKI
Application Number:
JP2012000212772
Publication Date:
January 24, 2013
Filing Date:
September 26, 2012
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
F04D19/04; F04B37/16; H01L21/02
Domestic Patent References:
JPS6289137U1987-06-08
JPH0814188A1996-01-16
JPH03118815A1991-05-21
JPH06101642A1994-04-12
JP2004019493A2004-01-22
JPS6289137U1987-06-08
Attorney, Agent or Firm:
Another role
Satoshi Muramatsu



 
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