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Patent Searching and Data


Title:
EXHAUSTER
Document Type and Number:
Japanese Patent JPH06336980
Kind Code:
A
Abstract:

PURPOSE: To open a relief valve positively to discharge gas even with the lead-in of a large quantity of diluent gas in the case of leading in diluent gas and exhausting it after dilution at the time of exhausting gas in a specific space through the relief valve.

CONSTITUTION: One end part of a housing 24 is connected to the exhaust port 23 of a cryopump 13 stored with gas to be discharged, and the other end part of the housing 24 is provided with an exhaust port 25. A relief valve 27 is provided in the housing 24, and the discharge port 41 of a lead-in pipe 40 for leading diluent gas into the housing 24 is turned to face the exhaust port 25. Accordingly, even in the case of leading in a large quantity of diluent gas, pressure rise in the housing 24 is prevented, so that there is no influence on the function of the relief valve 27.


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JPS61232391CRYOPUMP
JPS54153315CRYOPUMP
Inventors:
AMIKURA MANABU
Application Number:
JP15144193A
Publication Date:
December 06, 1994
Filing Date:
May 28, 1993
Export Citation:
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Assignee:
TEL VARIAN KK
International Classes:
F04B37/08; H01J37/18; H01J37/317; H01L21/265; H01L21/302; H01L21/3065; (IPC1-7): F04B37/08; H01J37/18; H01J37/317; H01L21/265; H01L21/302
Attorney, Agent or Firm:
金本 哲男 (外1名)