FAR-INFRARED THIN HEATER AND SUBSTRATE-HEATING FURNACE

Japanese Patent JP3929239

B2

PROBLEM TO BE SOLVED: To provide a far-infrared ray thin heater with a small annexed space accompanying installation, and provide a substrate-heating furnace having high production efficiency.
SOLUTION: Since exothermic bodies 38 are installed in a sheet metal 32 for heating a far-infrared radiating layer 44 and the exothermic bodies 38 are connected with an external power supply from an end part of the sheet metal 32, space is not needed to be installed for connecting them at a the rear face side of the heater 30. In addition, because this is constituted with the heat being generated from both sides of the heater 30 by the installation of the far-infrared radiation layers 44 at both sides of the sheet metal 32, no heat insulating space is necessary to be installed between respective stages, so as to suppress mutual interference of heat, even when it is used by being piled up in stages. Therefore, because the size of space necessary for installing the heater 30 is almost matches with that of the sheet metal 32, the far-infrared thin heater with a small annexed space accompanying installation can be obtained.

JPS5828190	TUNGSTEN HEATER FOR DEPOSITION
JP2022155221	MOUNTING PLATE AND MOUNTING STRUCTURE

Takahiro Kano
Takeyuki Kanda
Takatoshi Ishikawa

JP2000371397A

June 13, 2007

December 06, 2000

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Noritake Company Limited

H05B3/10; H05B3/20; F27D11/02; H05B3/66; H05B3/72; (IPC1-7): H05B3/10; F27D11/02; H05B3/20; H05B3/66; H05B3/72

JP58169694U
JP11204237A
JP11156536A
JP3066387U

Haruyuki Ikeda

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