To avoid waste of coating liquid and to save the time necessary for coating film to form a liquid membrane of the coating liquid on a substrate by scan-coating.
The coating apparatus is composed of a substrate holding part which moves the substrate in the direction of Y for keeping it practically horizontal, a supply nozzle which reciprocates in the direction of X while the coating liquid is discharged on the substrate, and a pair of liquid receiving parts which move freely back and forth in the direction of X for receiving the coating liquid from the supply nozzle at both ends of a moving area of the supply nozzle and for regulating an area to be coated. A master control part outputs a moving command of the substrate holding part and the liquid receiving part when the coating liquid deceleration of the supply nozzle is started as to a controller of the coating unit (Step S5) (Step S6), outputs a moving command for an opposite direction to a supply nozzle when these movements are completed (Step S8), and outputs commands other than the moving command for the supply nozzle, the substrate holding part and the liquid receiving part after the movement is started to the opposite direction of the supply nozzle.
ISHIZAKA NOBUKAZU
MORIKAWA SUKEAKI
ONO SHUJI
