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Title:
FILTRATION FILTER AND METHOD FOR MANUFACTURING FILTRATION FILTER
Document Type and Number:
Japanese Patent JP2012210619
Kind Code:
A
Abstract:

To provide a filtration filter which can retain a stable aperture diameter when filtering treatment is performed and besides, can be easily repaired and enables repeated use at the time of clogging of the filter.

This filtration filter 10 includes a subtrate laminate which is obtained by laminating a substrate 11 with a through-hole penetrating through the face and the back of the filter 10, a stopper 15 which regulates the gap between the mutual substrates 11 and a pillar 16 with a higher heat expansion coefficient than the stopper 15. Further, the gap between the substrates 11 at normal temperatures, is regulated at least by the stopper 15 by making the pillar 16 longer in length than the stopper 15. At the same time, the gap during heating is regulated by the pillar 16 expanded thermally. Thus, the filtering surface which captures a contaminant included in a liquid to be treated A by the gap between the substrates 11, is formed.


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Inventors:
MORIYA TAKESHI
YAMASHITA ASAO
Application Number:
JP2011156681A
Publication Date:
November 01, 2012
Filing Date:
July 15, 2011
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
B01D29/46
Domestic Patent References:
JPS63107712A1988-05-12
JP2002186810A2002-07-02
JP2007130532A2007-05-31
JP2003210916A2003-07-29
Attorney, Agent or Firm:
Another role Shigehisa
Satoshi Muramatsu