Title:
FLOW CONTROL METHOD AND FLOW CONTROLLER OF SUBSTRATE PROCESSOR
Document Type and Number:
Japanese Patent JP3859800
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To facilitate the designation of flow and achieve the improvement of board carriage efficiency by a carry mean, by forming flow information on the carriage of boards in such form that the processing part planned not to be used is added or mixed as option information to board carriage procedure, and selecting and designating this.
SOLUTION: MTR (carry robot) is specified from a recipe table by recipe No., and from this the flow No. and the option No. to designate the processing part for non use are specified, and, from the flow table, the step position of the processing part for non use is specified. When the recipe No. is transferred together with the delivery of boards to MTRs 31 and 32, a processing control means judges whether the step position of the processing part not to be used is the processing part in the next processing or not from the specified option No. MTRs 31-33 performs the delivery by carrying a board (B) to the processing part in this next processing when the processing part in the next processing is not non use, and it passes the processing part in the next processing when the processing part in the next processing becomes non use.
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Inventors:
Narita Katsunaga
Hiroshi Fujita
Hiroshi Fujita
Application Number:
JP6686197A
Publication Date:
December 20, 2006
Filing Date:
March 19, 1997
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G02F1/13; H01L21/677; G07C3/08; H01L21/02; H01L21/68; (IPC1-7): H01L21/68; G02F1/13; G07C3/08; H01L21/02
Domestic Patent References:
| JP6005689A | ||||
| JP7283094A |
Attorney, Agent or Firm:
Etsushi Kotani
Kyuichi Ueki
Tadashi Nagata
Takao Ito
Kyuichi Ueki
Tadashi Nagata
Takao Ito