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Title:
FLOW RATE CONTROLLER
Document Type and Number:
Japanese Patent JP2003167631
Kind Code:
A
Abstract:

To prevent the delay of responsiveness at controlling the opening degree of a valve body, and to reduce the setting space of this device by miniaturizing the configuration of the whole device.

This device is integrally assembled with a pulsation attenuating mechanism 24 for balancing an adjusted pilot pressure to be driven from a pressure adjusting part 54 and the primary pressure of a pressure fluid circulating through a fluid channel 36, and for attenuating the fluctuation of a pressure due to the pulsation of the pressure fluid and a flow rate control mechanism 26 for controlling the circulation quantity of the pressure fluid circulating through the fluid channel 36 by adjusting the valve lift quantity of a valve body 102 by a linear actuator 112 to be controlled based on a rotation driving control signal to be derived from a controller.


Inventors:
FUKANO YOSHIHIRO
UCHINO TADASHI
SUZUKI TAKAMITSU
Application Number:
JP2001000370480
Publication Date:
June 13, 2003
Filing Date:
December 04, 2001
Export Citation:
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Assignee:
SMC CORP
International Classes:
F15B1/00; F15B3/00; G05D16/02; G05D16/18; G05D16/20; (IPC1-7): G05D16/02; F15B1/00; F15B3/00; G05D16/18; G05D16/20
Attorney, Agent or Firm:
千葉 剛宏



 
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