Title:
流体供給装置
Document Type and Number:
Japanese Patent JP6944691
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a fluid supply device which does not require facilities such as a highland environmental test chamber, and which can supply a fluid of a predetermined pressure with an accuracy that could not be supplied by a conventional fluid supply device even in a transient test or the like.SOLUTION: A fluid supply device comprises: a first pressure chamber 10 for temporarily retaining fluid inflowing from an inflow port 2, and then allowing it to outflow from an outflow port 3; a second pressure chamber 20 connected to the first pressure chamber via a first opening 15 and which retains fluid therein; a pressure control unit connected to the second pressure chamber via a second opening 25, which controls the pressure of the fluid in the second pressure chamber; and a first pressure regulating unit 30 installed in the first opening, which regulates the pressure of the fluid within the first chamber by controlling the amount of fluid that outflows from the second pressure chamber to the first pressure chamber, or by controlling the amount of fluid that inflows from the second pressure chamber to the first pressure chamber.SELECTED DRAWING: Figure 1
Inventors:
Shinya Uchida
Masao Kashiwa
Suzuki Kazuya
Masao Kashiwa
Suzuki Kazuya
Application Number:
JP2017049100A
Publication Date:
October 06, 2021
Filing Date:
March 14, 2017
Export Citation:
Assignee:
Onishi Thermal Science Co., Ltd.
International Classes:
G05D16/20; G01M15/02
Domestic Patent References:
| JP1117748U | ||||
| JP2000314481A |
Foreign References:
| WO2000079164A1 |
Attorney, Agent or Firm:
Takayuki Takamatsu
Tokuko Suzuki
Tokuko Suzuki