To provide a fluid transfer path monitoring device and method and a polishing device with the fluid transfer path monitoring device capable of quickly and highly precisely detecting changes in the fluid transfer amount due to the deterioration of a pump or clogging of a filter disposed in the fluid transfer path.

This polishing device 30 is provided with a platen 34, a polishing head 35 and a tube pump 31. Slurry transfer pipes 41 positioned in front of and behind the tube pump 31 are attached with pressure straps 32a and 32b. Parts of the slurry transfer pipes 41 where the pressure straps 32a and 32b are attached are formed of a material with elasticity and radially expanded/contracted by the pulsation of the slurry. The expansion/contraction of the pipes 41 is detected by the pressure straps 32a and 32b. A monitoring circuit section 33 monitors the amplitudes and periods of output signals of the pressure straps 32a and 32b to determine the abnormality/normality of the tube pump 31.

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