Title:
FORCE DETECTION DEVICE AND ROBOT
Document Type and Number:
Japanese Patent JP2015184005
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a force detection device having excellent detection accuracy and capable of reducing influence on a temperature drift, and a robot.SOLUTION: A force detection device 1 comprises: a first base 2; a second base 3 arranged along a first direction with respect to the first base 2; a sealing member 9 which is provided in the portion in which the first base 2 overlaps the second base 3 when viewed from a second direction orthogonal to the first direction and which forms a closed space together with the first base 2 and the second base 3; and a piezoelectric element provided in the closed space. The modulus of longitudinal elasticity of the sealing member 9 is higher than the modulus of longitudinal elasticity of the first base 2 and the modulus of longitudinal elasticity of the second base 3.
Inventors:
ARAKAWA YUTAKA
Application Number:
JP2014057663A
Publication Date:
October 22, 2015
Filing Date:
March 20, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01L1/16; G01L5/16
Domestic Patent References:
| JPH0743226A | 1995-02-14 | |||
| JP2011256885A | 2011-12-22 | |||
| JP2014041038A | 2014-03-06 |
Foreign References:
| US20130340537A1 | 2013-12-26 |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe