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Title:
FORMATION OF HARD CARBON COATING FILM ON INNER PERIPHERAL FACE OF GUIDE BUSH
Document Type and Number:
Japanese Patent JP3043670
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To form a hard carbon coating film good in quality and adhesion on the inner peripheral face to be slid with the material to be worked in a guide bush.
SOLUTION: A guide bush 11 is arranged in a vacuum tank 61, an auxiliary electrode 71 is inserted into a center opening 11j forming the inner peripheral face thereof, the potentials thereof are held to earth potentials, the inside of the vacuum tank 61 is exhaused, a gas contg. carbon is introduced from a gas introducing port 63 into the vacuum tank 61, d.c. voltage is applied via a reactor 74 to the guide bush 11, furthermore, d.c. positive voltage is applied to an anode 79 and a.c. voltage is applied to a filament 78 to generate plasma within the vacuum tank 61, and by a plasma CVD method, a hard carbon coating film is formed on the inner peripheral face of the guide bush 11.


Inventors:
Sugiyama, Osamu
Miya, Yukio
Koike, Ryuta
Toida, Takashi
Sekine, Toshiichi
Application Number:
JP22285197A
Publication Date:
May 22, 2000
Filing Date:
August 19, 1997
Export Citation:
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Assignee:
CITIZEN WATCH CO LTD
International Classes:
B23B13/12; C23C16/02; C23C16/26; C23C16/27; C23C16/50; C23C16/503; C23C16/505; (IPC1-7): C23C16/27; B23B13/12; C23C16/503; C23C16/505
Attorney, Agent or Firm:
大澤 敬 (外1名)