Title:
FORMATION OF POROUS METAL FILM
Document Type and Number:
Japanese Patent JPH028398
Kind Code:
A
Abstract:
PURPOSE:To advantageously produce a porous thin metal film by forming a thin metal composite film on a support and removing fine particles or resin in the film by heating to make the film porous. CONSTITUTION:A thin metal composite film contg. fine particles or resin which is decomposed or vanished by heating in the metal matrix is formed on a prescribed support. At least part of the fine particles or resin in the film is then removed by heating to make the film porous. A porous thin metal film can be advantageously produced.
Inventors:
SHIBATA KAZUYOSHI
TAKEUCHI KATSUYUKI
TAKEUCHI KATSUYUKI
Application Number:
JP15773688A
Publication Date:
January 11, 1990
Filing Date:
June 24, 1988
Export Citation:
Assignee:
NGK INSULATORS LTD
International Classes:
C23C18/52; C23C14/06; C25D15/02; (IPC1-7): C23C14/06; C23C18/52; C25D15/02
Domestic Patent References:
| JPS59110794A | 1984-06-26 | |||
| JPS6059066A | 1985-04-05 |
Attorney, Agent or Firm:
Michio Nakajima (2 outside)
Next Patent: CONTINUOUS COLORING METHOD