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Patent Searching and Data


Title:
GAAS NO EKISOSEICHOHOHO
Document Type and Number:
Japanese Patent JPS5150884
Kind Code:
A
Inventors:
DOI KONEN
UTAKA MASATOSHI
Application Number:
JP12437374A
Publication Date:
May 04, 1976
Filing Date:
October 30, 1974
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
C30B19/00; C30B29/42; H01L21/208; (IPC1-7): B01J17/20; C01B27/02; H01L21/208



 
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