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Patent Searching and Data


Title:
GAS ANALYZER
Document Type and Number:
Japanese Patent JP2010249577
Kind Code:
A
Abstract:

To provide a gas analyzer for measuring a change in the concentration of a very small amount of a component with the elapse of time and analyzing gas containing a component sufficiently low in detection limit concentration.

The gas analyzer includes a denuder 100, a gas supply part (pump) 208, a liquid supply part (pump) 302 and an analyzer 700. The denuder 100 includes two flat wall surfaces extending in up and down directions to be opposed to each other. The pump 208 supplies gas to be analyzed to the gap between two wall surfaces from the region under the denuder 100 and the pump 302 supplies a liquid to the gap between two wall surfaces from the region above the denuder 100. The analyzer 700 analyzes the component contained in the liquid discharged from the region under the denuder 100.


Inventors:
SHIROMIZU YOSHIMI
TAKEUCHI MASAKI
Application Number:
JP2009000097196
Publication Date:
November 04, 2010
Filing Date:
April 13, 2009
Export Citation:
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Assignee:
RENESAS ELECTRONICS CORP
International Classes:
G01N1/22; G01N1/00; G01N1/02; G01N30/04; G01N30/06; G01N30/08; G01N30/88
Attorney, Agent or Firm:
速水 進治
野本 可奈
天城 聡