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Title:
GAS PURIFYING EQUIPMENT
Document Type and Number:
Japanese Patent JPS63278521
Kind Code:
A
Abstract:

PURPOSE: To control pressure in a closed vessel without using external gas by storing a purified gas in a storage tank at the downstream side of a gas circulating pipe having a gas purifying mechanism, and transmitting the purified gas under pressure to the storage tank or the closed vessel after completion of purification.

CONSTITUTION: Gas in the glove box 11 is flowed in the circulating pipe 2, and is purified passing through a deoxidation column 4 and a dehydration column 6, then is returned into the box 11. At that time, the purified gas is stored in the tank 13. At the time of inserting hands into the gloves of the box 11, the gas in the box 11 is transmitted under pressure into the tank 13 by a motor 14 through the pipes 19 and 17, hence the interior of the box 11 is decompressed. Moreover, at the time of pulling out the hands, the gas in the tank 13 is transmitted under pressure into the tank 11 by the motor 14 through the pipes 6 and 21, hence it is pressurized.


Inventors:
TAKASUGI KOJI
Application Number:
JP1987000112072
Publication Date:
November 16, 1988
Filing Date:
May 08, 1987
Export Citation:
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Assignee:
TAKASUGI SEISAKUSHO KK
International Classes:
B01L1/00; B01D53/04; B25J21/02; (IPC1-7): B01D53/04; B01L1/00
Domestic Patent References:
JPS59116109A1984-07-04
JPS4955560A1974-05-29