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Patent Searching and Data


Title:
GATE VALVE AND EXPOSURE SYSTEM
Document Type and Number:
Japanese Patent JP2008111464
Kind Code:
A
Abstract:

To reduce the generation of vibrations accompanying the opening and closing of a valve element in a gate valve to be used in a vacuum exposure system, a vacuum inspection system, etc. and an exposure system having the gate valve.

The gate valve for opening and closing the opening portion of a valve body by the movement of the valve element comprises a hydrostatic bearing for guiding the movement of the valve element. In addition, the hydrostatic bearing is arranged in the valve body. Further, the gate valve comprises a differential discharge seal for sealing the opening portion when the opening portion has been closed.


Inventors:
OKUBO YUKIHARU
Application Number:
JP2006293891A
Publication Date:
May 15, 2008
Filing Date:
October 30, 2006
Export Citation:
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Assignee:
NIKON CORP
International Classes:
F16K3/316; F16K3/02; G03F7/20; H01L21/027; H01L21/677
Attorney, Agent or Firm:
Furuya
Toshihide Mori