To provide a heat treatment furnace, preventing the interior of a heat insulating material casing from being saturated or almost saturated with vapor in a process of heating in reduced pressure.
This heat treatment furnace 1 includes a vacuum chamber 2 and the heat insulating material casing 3 disposed in the vacuum chamber 2 and having a heat treatment part 4 and a heat source 5 in the interior thereof, wherein a vent hole 6 communicating the interior of the heat insulating material casing 3 to the outside is formed in the heat insulating material casing 3, and a heat insulating member 7 having a heat insulating surface 8 disposed at a predetermined space from the heat insulating material casing 3 is provided on the axis 9 in the ventilating direction of the vent hole 6.
JP2502470 | THERMAL TREATMENT FURNACE |
WO/2013/099627 | VACUUM HEAT TREATMENT DEVICE |
JP2002235102A | 2002-08-23 | |||
JP2001221575A | 2001-08-17 | |||
JPH0587459A | 1993-04-06 | |||
JPS6020082A | 1985-02-01 | |||
JPH06241662A | 1994-09-02 |
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