Title:
HEATING DEVICE
Document Type and Number:
Japanese Patent JP2012145283
Kind Code:
A
Abstract:
To provide a heating device enabling heating and measurement of an object while moving the object on a stage without providing the heating device with a sealed structure to perform measurement of high accuracy while evenly and uniformly heating the object at a high temperature.
This heating device is configured by disposing a plate-type heater 5 having an opening section 10 for measurement on a top face of the object 6, and loading a heating case 9 constituted of a contact or non-contact type heating unit 7, and a supporting body 11 supporting the object 6, on the stage at a lower face of the object 6, and the object 6 can be heated and measured while moving the stage.
Inventors:
INOUE MASATOSHI
Application Number:
JP2011004480A
Publication Date:
August 02, 2012
Filing Date:
January 13, 2011
Export Citation:
Assignee:
TAKAOKA ELECTRIC MFG CO LTD
International Classes:
F27D11/02; F27D19/00; F27D21/02; H05B3/00
Domestic Patent References:
JP2006165402A | 2006-06-22 | |||
JP2002357800A | 2002-12-13 | |||
JPH03248430A | 1991-11-06 | |||
JPH09203687A | 1997-08-05 | |||
JP2000047163A | 2000-02-18 | |||
JP2006201120A | 2006-08-03 | |||
JPH06102193A | 1994-04-15 | |||
JPH07281453A | 1995-10-27 | |||
JPH09171953A | 1997-06-30 | |||
JP2008157559A | 2008-07-10 |
Foreign References:
WO2010116809A1 | 2010-10-14 |