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Title:
HEATING DEVICE
Document Type and Number:
Japanese Patent JP2012145283
Kind Code:
A
Abstract:

To provide a heating device enabling heating and measurement of an object while moving the object on a stage without providing the heating device with a sealed structure to perform measurement of high accuracy while evenly and uniformly heating the object at a high temperature.

This heating device is configured by disposing a plate-type heater 5 having an opening section 10 for measurement on a top face of the object 6, and loading a heating case 9 constituted of a contact or non-contact type heating unit 7, and a supporting body 11 supporting the object 6, on the stage at a lower face of the object 6, and the object 6 can be heated and measured while moving the stage.


Inventors:
INOUE MASATOSHI
Application Number:
JP2011004480A
Publication Date:
August 02, 2012
Filing Date:
January 13, 2011
Export Citation:
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Assignee:
TAKAOKA ELECTRIC MFG CO LTD
International Classes:
F27D11/02; F27D19/00; F27D21/02; H05B3/00
Domestic Patent References:
JP2006165402A2006-06-22
JP2002357800A2002-12-13
JPH03248430A1991-11-06
JPH09203687A1997-08-05
JP2000047163A2000-02-18
JP2006201120A2006-08-03
JPH06102193A1994-04-15
JPH07281453A1995-10-27
JPH09171953A1997-06-30
JP2008157559A2008-07-10
Foreign References:
WO2010116809A12010-10-14



 
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