Title:
効率的発熱を有し、機械的安定性を有する加熱素子構造
Document Type and Number:
Japanese Patent JP2008534893
Kind Code:
A
Abstract:
An embodiment of the present invention is a heating element structure. A first tray has an inner boundary and an outer boundary. The inner and outer boundaries define a space. A first heating element fit to the first tray and surrounding the inner boundary generates heat when power is applied. The heating element expands in the space within a temperature range.
Inventors:
Emami, Arthuran
Agamo Hammadi, Mitch
Cedy, Said
Agamo Hammadi, Mitch
Cedy, Said
Application Number:
JP2007552405A
Publication Date:
August 28, 2008
Filing Date:
January 24, 2006
Export Citation:
Assignee:
Nextherm Incorporated
International Classes:
F27D11/02; C23C16/46; H01L21/22; H01L21/31; H01L21/324; H05B3/06; H05B3/62
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa