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Title:
HIGH-ELECTRON MOBILITY TRANSISTOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JPH09275209
Kind Code:
A
Abstract:

To provide a high-electron mobility transistor and manufacturing method thereof whereby the parasitic capacitance of the gate is reduced to improve the high frequency characteristics.

This high-electron mobility transistor comprises an upper and lower wide band gap layers on the upper and lower faces of a channel layer for forming an electron gas layer having a substantially uniform density, Si planner doping layers, 25a, 23a formed respectively in the upper and lower wide band gap layers 25, a drain-source electrode contact layer formed on the upper on the upper band gap layer, T-shaped gate electrodes 29 formed in recesses formed so as to separate the electrode contact layer 26, and passivation film 28 covering the insides of the recesses and lower parts of the gate electrodes.


Inventors:
ISHIKAWA YAMATO
Application Number:
JP10839296A
Publication Date:
October 21, 1997
Filing Date:
April 04, 1996
Export Citation:
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Assignee:
HONDA MOTOR CO LTD
International Classes:
H01L29/41; H01L21/285; H01L21/335; H01L21/338; H01L29/423; H01L29/778; H01L29/812; (IPC1-7): H01L29/778; H01L21/338; H01L29/41; H01L29/812
Attorney, Agent or Firm:
櫻井 俊彦