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Patent Searching and Data


Title:
HIGH-FREQUENCY GLOW-DISCHARGE APPARATUS
Document Type and Number:
Japanese Patent JPH01233730
Kind Code:
A
Abstract:

PURPOSE: To distribute a film thickness evenly and to enhance the quality of a film by a method wherein a stray capacitance formed between an electrode and an earthing shield can be changed from the outside in order to expand a variable range of a parameter.

CONSTITUTION: An earthing shield plate 2 is installed around an electrode 1; a hollow spacer 10 composed of an insulator is laid between the electrode 1 and the shield plate 2. A storage part 10a used to store a liquid dielectric 11 to be injected from the outside is formed inside the spacer 10. When a material or an injection amount of the dielectric 11 to be injected into the spacer 10 is changed, a stray capacitance formed between the electrode 1 and the shield plate 2 can be changed arbitrarily. By this setup, a variable range of a parameter can be expanded; a film thickness can be distributed uniformly; the quality of a film can be enhanced.


Inventors:
IKUJI NOZOMI
Application Number:
JP6132988A
Publication Date:
September 19, 1989
Filing Date:
March 14, 1988
Export Citation:
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Assignee:
SHIMADZU CORP
International Classes:
H01L21/205; H01L21/31; (IPC1-7): H01L21/205; H01L21/31