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Title:
HIGH FREQUENCY INDUCTION HOT PLASMA DEVICE
Document Type and Number:
Japanese Patent JP3088604
Kind Code:
B2
Abstract:

PURPOSE: To provide a high frequency induction hot plasma device by which a gas ring tip part can be safely cooled by cooling water without using oil as a cooling medium.
CONSTITUTION: Flanges 57 and 58 to form plasma gas supply passages 59 and 61 are constituted so as to be heated by a disk-shaped heater 65. A pipe shaped heater 56 is arranged on a side surface of a passage B, and a heating electric current is supplied to this heater from external heating electric power supply so as to be heated. As a result, since film forming material gas which passes through the plasma gas supply passages 59 and 61 and also passes through the passage B is properly heated by the heaters 65 and 56, it is introduced in plasma P formed in a duplex tube 2 without condensing. Thereby, the plasma can be stably maintained for many hours.


Inventors:
Hisashi Komaki
Application Number:
JP4226094A
Publication Date:
September 18, 2000
Filing Date:
March 14, 1994
Export Citation:
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Assignee:
JEOL Ltd.
International Classes:
H05H1/30; C23C16/50; C23C16/505; H05H1/46; (IPC1-7): H05H1/30; C23C16/50; H05H1/46
Domestic Patent References:
JP389499A
JP499399U
Attorney, Agent or Firm:
Fujishima Ijima (1 outside)