Title:
HIGH-RESOLUTION SCANNING MICROSCOPY
Document Type and Number:
Japanese Patent JP2019211788
Kind Code:
A
Abstract:
To improve image photographing speed, and adaption possibility of illumination light distribution for use in Laser Scanning Microscopes (LSM).SOLUTION: In a microscope for a high resolution scanning microscopy inspection of a sample, a detection device comprises: a detector array that includes pixels, and is larger than a single image; and a non-imaging redistribution element that is arranged upstream of the detector array and redistributes, in a non-imaging manner, a radioactive ray from a detection plane surface on the pixels of the detector array. At least one phase mask 49.1 having a phase influence variably shifted in a lateral direction is provided in at least one direction out of a direction orthogonal to an optical axis and the optical axis direction for causing spatial distribution of at least one out of illumination light and detection light to be generated in or around an objective lens pupil or in a plane surface conjugate with the objective lens pupil.SELECTED DRAWING: Figure 13
Inventors:
KLEPPE INGO
NETS RALF
THOMAS KALKBRENNER
WOLLESCHENSKY RALF
YAUHENI NOVIKAU
NETS RALF
THOMAS KALKBRENNER
WOLLESCHENSKY RALF
YAUHENI NOVIKAU
Application Number:
JP2019155893A
Publication Date:
December 12, 2019
Filing Date:
August 28, 2019
Export Citation:
Assignee:
ZEISS CARL MICROSCOPY GMBH
International Classes:
G02B21/06
Domestic Patent References:
| JP2010538326A | 2010-12-09 | |||
| JP2011095745A | 2011-05-12 | |||
| JP2006243731A | 2006-09-14 | |||
| JP2012504226A | 2012-02-16 | |||
| JP2002062261A | 2002-02-28 | |||
| JP2012022282A | 2012-02-02 | |||
| JP2010506203A | 2010-02-25 | |||
| JP2011527218A | 2011-10-27 |
Foreign References:
| US20070206276A1 | 2007-09-06 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda