PURPOSE: To eliminate vibration by reducing weight by forming the inside of a work table to reciprocate in the first coordinate axis direction as a honeycomb structure, and driving a workpiece through a steel band by holding the workpiece in a vacuum on the planar work surface.

CONSTITUTION: A work table 8 to reciprocate on a base structure 20 is driven by a driving motor 64 through a steel band 38 and a flywheel 69 by holding a film-like workpiece by vacuum suction from a large number of pinholes 54 arranged in the planar work surface 92 by reducing weight by forming the inside as a honeycomb structure. While, a photoplotter head 6 performs photoplotting by moving in the width direction by a driving motor 65 through a steel band 36 and a flywheel by being slidingly installed on a bridge 34 fixed to the base structure 20. Thus, a highly accurate coordinate control system can be obtained in low vibration.