Title:
HOLDING SURFACE CLEANER
Document Type and Number:
Japanese Patent JP2020116665
Kind Code:
A
Abstract:
To prevent grinding dust from remaining on and re-adhering to a holding surface and prevent reduction of flatness of the holding surface in a holding surface cleaner which cleans a holding surface of a chuck table.SOLUTION: A holding surface cleaner 8 is used to clean a holding surface 300a of a chuck table 30 which holds a workpiece W and includes: a knife 80 having a linear blade edge 800 which is placed in contact with the holding surface 300a; a holding part 81 which holds the knife 80 with the blade edge 800 facing the holding surface 300a; and moving means 82 which places the blade edge 800 in contact with the holding surface 300a or separates the blade edge 800 from the holding surface 300a. The holding surface cleaner 8 places the blade edge 800 in contact with the holding surface 300a and inclines the knife 80 so that the blade edge 800 goes ahead in a moving direction to move the holding surface 300a and the knife 80 relatively and cut and remove deposits adhering to the holding surface 300a with the blade edge 800.SELECTED DRAWING: Figure 2
Inventors:
WOO JUNSOO
SUZUKI TAKAMASA
SUZUKI TAKAMASA
Application Number:
JP2019008430A
Publication Date:
August 06, 2020
Filing Date:
January 22, 2019
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/06; B08B1/00; B08B3/02; B08B5/02; B23Q11/00; B24B41/06; H01L21/304; H01L21/683
Domestic Patent References:
| JPH03121778A | 1991-05-23 | |||
| JPH08155405A | 1996-06-18 | |||
| JP2016198874A | 2016-12-01 | |||
| JP2017140663A | 2017-08-17 | |||
| JPS6146144U | 1986-03-27 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office