Title:
HOLDING TABLE, AND GRINDING METHOD AND CUTTING METHOD USING THE SAME
Document Type and Number:
Japanese Patent JP2015199153
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a holding table capable of sucking and holding even a plate-like workpiece having warp without complicating processes and deteriorating productivity, and a grinding method and a cutting method using the holding table.SOLUTION: A holding table holds a plate-like workpiece. The holding table includes: a base table having a suction surface on a front face and including a suction section connected to a suction source; and an elastic pad which is disposed on the suction surface of the base table and has a plurality of suction passages formed to communicate an abutting surface abutting on the suction surface with a holding surface for holding the plate-like workpiece on a back face of the abutting surface. In the holding table, the elastic pad has hardness that the plate-like workpiece sinks in the elastic pad by self-weight of the plate-like workpiece, and the elastic pad contracts to prescribed thickness when the elastic pad sucks the plate-like workpiece.
Inventors:
SEKIYA KAZUMA
Application Number:
JP2014078452A
Publication Date:
November 12, 2015
Filing Date:
April 07, 2014
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B41/06; B23Q3/08; B23Q3/10; B24B7/04; B24B27/06; H01L21/301; H01L21/304
Domestic Patent References:
| JP2006015457A | 2006-01-19 | |||
| JP2012121096A | 2012-06-28 | |||
| JPH11339647A | 1999-12-10 | |||
| JP2014011378A | 2014-01-20 | |||
| JPH0414239A | 1992-01-20 | |||
| JP2012187645A | 2012-10-04 | |||
| JPH09109021A | 1997-04-28 |
Foreign References:
| US5964646A | 1999-10-12 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto