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Title:
IMAGE DETECTING DEVICE
Document Type and Number:
Japanese Patent JPH09180666
Kind Code:
A
Abstract:

To largely improve detection efficiency.

In an image detecting device obtaining an image signal related to a scanned object by scanning a beam or a probe in accordance with a scan signal relating to the scanned object, as the scan signal, the horizontal/vertical scan signals X (t) and Y (t) of arcsine-shaped pulse as follows is repeatedly used respectively as 1 cycle. [1 cycle of horizontal scan signal] 0≤t≤a, X (t)=(A/π) {π/2+arcsin (2t/a-1}. [1 cycle of vertical scan signal] 0≤t≤b, Y (t)=(B/π) {π/2+arcsin (2t/b-1}. where, A, B represent scan widths, a, b the periods (a<b), and t the time in 1 cycle.


Inventors:
FUJISAKI HISAO
Application Number:
JP34347995A
Publication Date:
July 11, 1997
Filing Date:
December 28, 1995
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01N35/00; G01Q10/04; G01Q30/04; G01Q60/10; G01Q60/24; H01J37/147; H01J37/22; H01J37/28; (IPC1-7): H01J37/22; G01N35/00; H01J37/147; H01J37/28