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Title:
INFRARED RAY PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2016040497
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To at least monitor or control a condition of a processed object with higher accuracy.SOLUTION: In an infrared ray processing device 10, radiation intensity sensors 60 detect a coating film radiation intensity Ec as radiation intensity of infrared ray from a coating film 82 (detection part 83) in a processing space 12a. A controller 90 monitors and controls a condition of the coating film 82 under infrared ray processing on the basis of the detected coating film radiation intensity Ec. The infrared ray processing device 10 includes a plurality of radiation intensity sensors 60 having different detection parts 83 on the coating film 82, and the controller 90 monitors and controls the condition of the coating film 82 on the basis of the coating film radiation intensity Ec of the plurality of detection parts 83. The controller 90 controls the infrared ray heater 30 corresponding to the detection part 83 so that a ratio R based on the coating film radiation intensity Ec of the detection part 83 reaches a target value Rt, with respect to each of the plurality of detection parts 83.SELECTED DRAWING: Figure 1

Inventors:
FUJITA TAKEKI
Application Number:
JP2014164356A
Publication Date:
March 24, 2016
Filing Date:
August 12, 2014
Export Citation:
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Assignee:
NGK INSULATORS LTD
International Classes:
F26B23/04; G01J5/00; G01J5/60
Attorney, Agent or Firm:
Aitec International Patent Office