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Patent Searching and Data


Title:
INSPECTION DEVICE AND INSPECTION METHOD FOR REFLECTED LIGHT PATTERN
Document Type and Number:
Japanese Patent JPH0777493
Kind Code:
A
Abstract:

PURPOSE: To accurately inspect a two-dimensional pattern by providing a fluorescent fiber in the scanning direction of the reflected light, and receiving the output light from both ends with a photo-sensor.

CONSTITUTION: A laser beam 3 is converged and scanned on a substrate 1, and the reflected light 6 from the substrate 1 passes through an image forming lens 7 to form an image. A fluorescent fiber 14 is provided at the image forming position of the reflected light 6 in parallel with the scanning direction of the laser beam 3. The fiber 14 converts the reflected light 6 forming the image via the lens 7 into fluorescence with uniform intensity, and it is sent to a photo- sensor 12 via fiber ends 16. The fiber 14 has the diameter of about 1-2mm, the sensor 12 has the diameter of about 20mm, thus two fiber ends 16 of the fiber 14 can be easily set at the center of the sensor 12, and the fiber 14 can be arranged at the image forming position of the lens 7. The inside of the fiber 14 is formed into a mirror finished surface having a high reflection factor, the reflected light 6 transmitting the fiber 14 is re-captured, and the conversion efficiency is improved.


Inventors:
NAKAMURA YUTAKA
HIZUKA TETSUO
SAKAI SATORU
ANDO MORITOSHI
Application Number:
JP1993000174601
Publication Date:
March 20, 1995
Filing Date:
July 15, 1993
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G01N21/55; G02B6/00; (IPC1-7): G01N21/55; G02B6/00
Attorney, Agent or Firm:
井桁 貞一