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Patent Searching and Data


Title:
INSPECTION INSTRUMENT FOR CHARACTERISTICS OF PHOTOSEMICONDUCTOR
Document Type and Number:
Japanese Patent JPS6390736
Kind Code:
A
Abstract:

PURPOSE: To eliminate the need for optical axis alignment at the time of measurement and to shorten the measurement time by using a bundle optical fiber for a monochromator and a measurement head, and employing a slantingly cut bundle optical fiber which has a large diameter and eliminates reflected light by using a toroidal condenser.

CONSTITUTION: A laser diode 3 as an element to be measured is inserted into a laser diode socket 2 so as to emit light, the laser diode 3 emits light by a light source driving power source 1 which supplies electric power to the laser diode 3, and the emitted light beam is made incident on the circular type slantingly cut bundle optical fiber 5 by the toroidal condenser 4 which converges the beam efficiently. At one projection terminal, the beam becomes a rectangular projection beam in consideration of an incidence slit 7 and the beam is guided to the incidence slit 7 through a incidence condenser 6 again; and the monochromator 8 makes a spectrum selection and the light beam is stopped down by a projection condenser 10 from a projection slit 9 and converted by a photoelectric converter 11 into an electric signal. A controller 12 performs data processing and condition setting.


Inventors:
TADA TOSHIO
Application Number:
JP23651186A
Publication Date:
April 21, 1988
Filing Date:
October 03, 1986
Export Citation:
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Assignee:
NEC CORP
International Classes:
H01L21/66; G01J1/00; G01M11/00; G01R31/26; (IPC1-7): G01J1/00; G01M11/00; G01R31/26; H01L21/66