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Patent Searching and Data


Title:
LASER HEATING DEVICE
Document Type and Number:
Japanese Patent JP2000087223
Kind Code:
A
Abstract:

To provide a laser heating device with which a sample substrate can be efficiently and accurately heated in a vacuum device.

The laser heating device 20 heats a substrate 1 for formation of a thin film. The substrate 1 disposed in the vacuum chamber 101 of a film forming device 100 is heated to a specified temp. by irradiation of laser light. The laser light is introduced near to the substrate 1 through an optical fiber 23, and the laser light is made to directly or indirectly irradiate the substrate 1 from the end face of the optical fiber 23. The optical fiber 23 is inserted through a housing pipe 24, and the housing pipe 24 is evacuated. The laser light is made to irradiate the substrate 1 from the end face of the optical fiber 23 by way of a reflection mirror 33, and Nd:YAG laser light is used.


Inventors:
KOINUMA HIDEOMI
KAWASAKI MASASHI
Application Number:
JP1998000258973
Publication Date:
March 28, 2000
Filing Date:
September 11, 1998
Export Citation:
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Assignee:
JAPAN SCIENCE & TECH CORP
International Classes:
C23C14/24; C23C14/54; (IPC1-7): C23C14/24
Attorney, Agent or Firm:
平山 一幸 (外1名)