LIGHT COLLECTION MIRROR TYPE HEATING FURNACE - NAT INST ADVANCED IND SCIENCE & TECH

Title:

LIGHT COLLECTION MIRROR TYPE HEATING FURNACE

Document Type and Number:

Japanese Patent JP2016109318

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To solve the problem that in a conventional light collection mirror type heating furnace, it is difficult to attain both of cooling efficiency and downsizing of a device.SOLUTION: In a light collection mirror type heating furnace, light radiated from a light source is reflected by a reflection mirror to irradiate a heated object, and thereby the heated object is heated. The light source, and the reflection mirror and the heated object are sectioned by a wall having a window member having infrared permeability to be positioned to independently individual chambers. Light radiated to a heated object surface penetrates the window member having infrared permeability to irradiate the heated object.SELECTED DRAWING: Figure 1

Inventors:

IKEDA SHINICHI
MIKAHARA TAKANORI
MIURA NORIKO
KUMPUAN SOMAWANG
HARA SHIRO
ONISHI YASUHIRO
YAMADA TAKESHI
AIZAWA TAKESHI
NOGAWA MITSUNORI

Application Number:

JP2014244539A

Publication Date:

June 20, 2016

Filing Date:

December 02, 2014

Export Citation:

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Assignee:

NAT INST ADVANCED IND SCIENCE & TECH
YONEKURA SEISAKUSHO:KK

International Classes:

F27B17/00; C03B19/00; C03C17/22; C23C14/50; C23C16/48; C30B25/10; F27D11/02; H01L21/205; H01L21/26; H01L21/31

Domestic Patent References:

JPH1082589A	1998-03-31
JPH0972669A	1997-03-18
JP2004303672A	2004-10-28
JPS5542284A	1980-03-25
JPH06215616A	1994-08-05
JPS62127472A	1987-06-09
JP2000138006A	2000-05-16
JP2002305153A	2002-10-18
JP2004296558A	2004-10-21
JPH02282689A	1990-11-20

Foreign References:

WO2013081107A1

2013-06-06

Attorney, Agent or Firm:

Zentaro Hasebe
Yasuyuki Yamada

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