Title:
液体接着組成物、多層構造体及び該構造体の作製方法
Document Type and Number:
Japanese Patent JP6882438
Kind Code:
B2
Abstract:
A liquid adhesion composition can include at least one polymerizable compound comprising at least two functional groups; a solvent; a catalyst; and a cross-linking agent, wherein the cross-linking agent can have a structure of Formula (1): A [X—(O—Y—)n1—N(CH2—OR)2]n2 (1), wherein A is an alkyl group, or an aromatic group, or a heteroaromatic group; X is C1-5 alkyl, Y is C1-4 linear or branched alkyl; n1 is 1-10; R is C1-6 alkyl; and n2 is 1-6. The liquid adhesion composition can be cured at elevated temperatures and may be applied in nanoimprint lithography for attaching an imprint resist layer on a substrate.
Inventors:
Fen one
Wei Jun Liu
Wei Jun Liu
Application Number:
JP2019223647A
Publication Date:
June 02, 2021
Filing Date:
December 11, 2019
Export Citation:
Assignee:
Canon Inc
International Classes:
C09J4/02; B32B27/00; B32B27/30; C08G12/06; C09J11/06
Domestic Patent References:
| JP2017152705A | ||||
| JP2018080260A | ||||
| JP2011508680A | ||||
| JP2007329276A | ||||
| JP6027669A |
Foreign References:
| WO2015146524A1 | ||||
| WO2009128513A1 |
Attorney, Agent or Firm:
Okabe
Takao Ochi
Koji Yoshizawa
Masami Saito
Takao Ochi
Koji Yoshizawa
Masami Saito