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Patent Searching and Data


Title:
LIQUID CRYSTAL IMAGE DISPLAY AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE FOR IMAGE DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2002190603
Kind Code:
A
Abstract:

To solve the problem that overlap capacitance between a source and a drain is large and varies within the surface, and causes flickers and crosstalks in a high resolution device having a large display, since the positional relation between a gate and the source/drain is determined not by self alignment but by mask alignment at exposure, in the conventional TFT, regardless of whether it is a channel etch type or an etch stop type.

A self aligned TFT is used as a basic component. In the TFT, a gate metal/gate insulating layer, a semiconductor layer, a protective insulating layer, and even a lift-off layer are formed by collective lithography, an organic insulating layer is formed on the side surface of a gate, a resist pattern is retreated, and a source/drain region is formed. Rationalization is enabled, and the number of processes is reduced by introducing a low-temperature technique where an organic insulating layer is formed on a source/drain wiring and a passivation insulating layer is made unnecessary; and a technique where an organic insulating layer is formed on an exposed scanning line by using a process for forming a source/drain electrode and a process for forming an aperture part on the insulating layer.


Inventors:
KAWASAKI KIYOHIRO
Application Number:
JP2000388324A
Publication Date:
July 05, 2002
Filing Date:
December 21, 2000
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G02F1/1368; G09F9/30; H01L21/336; H01L29/786; (IPC1-7): H01L29/786; G02F1/1368; G09F9/30; H01L21/336
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)