Title:
リチウム薄膜の製造方法及びリチウム薄膜の製造装置
Document Type and Number:
Japanese Patent JP6950867
Kind Code:
B2
Abstract:
To provide a method and apparatus for manufacturing a lithium thin film, suitable for depositing the lithium thin film to both surfaces of copper foil using a roll-to-roll type apparatus.SOLUTION: A method for manufacturing a lithium thin film comprises: depositing a first lithium thin film on the treated surface of a first organic film; arranging copper foil on the first lithium thin film to form a first structure; winding the first structure in a roll shape so that the copper foil is on an inner side from the first organic film to form a first wound body 91; depositing a second lithium thin film on the treated surface of a second organic film; arranging the first structure on the second lithium thin film so that the copper foil of the first structure fed from the first wound body contacts the second lithium thin film to form a second structure; and winding the second structure in a roll shape so that the copper foil is on an inner side from the first organic film to form a second wound body.SELECTED DRAWING: Figure 2
Inventors:
Yokoyama Reikan
Kazuhiko Saito
Takahiro Hirono
Tomoharu Fujii
Kazuhiko Saito
Takahiro Hirono
Tomoharu Fujii
Application Number:
JP2018052375A
Publication Date:
October 13, 2021
Filing Date:
March 20, 2018
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/56; B65H18/08; B65H23/188; C23C14/14; C23C16/06; C23C16/44; C23C16/54
Domestic Patent References:
| JP201189160A | ||||
| JP201431539A | ||||
| JP200643965A | ||||
| JP2012219322A |
Foreign References:
| US20110143019 |
Attorney, Agent or Firm:
Junichi Omori
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino