Title:
LOAD LOCK DEVICE
Document Type and Number:
Japanese Patent JP2021103787
Kind Code:
A
Abstract:
To provide a load lock device that is advantageous for reducing rise of particles into a space above a substrate from a pump.SOLUTION: A load lock device 100 comprises: a load lock chamber 110 that has a first conveyance port 111 connected with a transfer chamber 20 to be connected to a decompression processing device 10, and a second conveyance port 112 connected with a loader chamber 30; a substrate holder 120 that holds a substrate S in the load lock chamber; a drive mechanism 130 that is arranged below the load lock chamber to lift and lower the substrate holder and coupled to the substrate holder with a coupling member 122; an extended chamber 140 that is extended laterally from a lower part of the load lock chamber; and a pump 150 that is arranged below the extended chamber and exhausts a gas in the load lock chamber through the extended chamber. The extended chamber has a bottom face having an opening 142 at a position shifted from a vertically lower part of the substrate holder, and the pump is connected with the opening.SELECTED DRAWING: Figure 1
Inventors:
MIURA JUN
FUKUDA NAOYA
KUMAGAI SHUJI
TAKAGI SHINJI
TODA TETSURO
SHIMOKAWA HIDETOSHI
NEGISHI SATOSHI
NOMURA SATOSHI
SOEDA JUNYA
FUKUDA NAOYA
KUMAGAI SHUJI
TAKAGI SHINJI
TODA TETSURO
SHIMOKAWA HIDETOSHI
NEGISHI SATOSHI
NOMURA SATOSHI
SOEDA JUNYA
Application Number:
JP2021050232A
Publication Date:
July 15, 2021
Filing Date:
March 24, 2021
Export Citation:
Assignee:
CANON ANELVA CORP
International Classes:
H01L21/677
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office