PURPOSE: To achieve an analysis of a local structural of a very small area as well as surface, by irradiating the very small area with intense X rays using a focusing device.

CONSTITUTION: A white X ray beam 1 is spectrally analyzed with a crystal spectroscope 2 to obtain a monochroic X ray beam 3, which is focused with a Fresnel zonal plate 4 at a specified position on the surface of a sample 5 to be inspected. As the focal length of the Fresnel zonal plate 4 is inversely proportional to the wavelength, light with a different energy (wavelength) can be focused at a fixed position of the sample 5 by varying the interval (x) between the sample 5 and the Fresnel zonal plate 4. Released ions are detected and measured with a mass spectrometer 6 facing a sample surface and recorded with a recorder 7. Here, with the relaxation following the excitation of inner- shell electrons, ions released from the sample are only confined to the very surface of the sample, and thus information only on the surface thereof can be obtained by detecting the ions.