Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR PRODUCING TANTALUM NITRIDE (Ta3 N5)
Document Type and Number:
Japanese Patent JP2017165605
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an industrial production method for TaNwith a low oxygen content.SOLUTION: A method for producing tantalum nitride (TaN) includes nitriding of metal tantalum at 800-950°C in an ammonia gas atmosphere.SELECTED DRAWING: None

Inventors:
TSUNEYODA KAZUHIKO
KISHIMORI CHIKA
Application Number:
JP2016050360A
Publication Date:
September 21, 2017
Filing Date:
March 15, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TAIHEIYO CEMENT CORP
International Classes:
C01B21/06
Attorney, Agent or Firm:
特許業務法人アルガ特許事務所
高野 登志雄
中嶋 俊夫
村田 正樹
山本 博人