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Title:
MACHINING DEVICE
Document Type and Number:
Japanese Patent JP2011167811
Kind Code:
A
Abstract:

To provide a machining device capable of discharging water in water supply piping when stopping the operation of the device.

The machining device includes master piping 68; slave piping 72a, 72b, 72c; air supply piping 78 supplying air from an air supplying source 66; a master opening/closing valve 82; an air opening/closing valve 86; slave opening/closing valves 84a, 84b, 84c; and a controlling means for controlling the opening/closing timing of the master opening/closing valve 82, the plurality of the slave opening/closing valves 84a, 84b, 84c, and the air opening/closing valve 86. The controlling means controls to close the air opening/closing valve 86, open the master opening/closing valve 82, and open the slave opening/closing valves when supplying water into a selected water jetting part; and controls to close the master opening/closing valve 82, open the air opening/closing valve 86, and close all of the slave opening/closing valves 84a, 84b, 84c, and then open the slave opening/closing valves 84a, 84b, 84c one by one and close those after that, when discharging water remaining in the master piping 68 and the slave piping.


Inventors:
INAO TOSHITAKA
Application Number:
JP2010000034194
Publication Date:
September 01, 2011
Filing Date:
February 19, 2010
Export Citation:
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Assignee:
DISCO CORP
International Classes:
B23Q11/10; B24B55/02; H01L21/304
Domestic Patent References:
JP2008080427A2008-04-10
Attorney, Agent or Firm:
松本 昂
伊藤 憲二



 
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